JPH0438185Y2 - - Google Patents
Info
- Publication number
- JPH0438185Y2 JPH0438185Y2 JP6601390U JP6601390U JPH0438185Y2 JP H0438185 Y2 JPH0438185 Y2 JP H0438185Y2 JP 6601390 U JP6601390 U JP 6601390U JP 6601390 U JP6601390 U JP 6601390U JP H0438185 Y2 JPH0438185 Y2 JP H0438185Y2
- Authority
- JP
- Japan
- Prior art keywords
- detector
- clean room
- fire
- air conditioner
- generated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000779 smoke Substances 0.000 claims description 22
- 230000005856 abnormality Effects 0.000 claims description 21
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 239000002245 particle Substances 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 7
- 230000003749 cleanliness Effects 0.000 claims description 6
- 230000002265 prevention Effects 0.000 claims description 6
- 238000004378 air conditioning Methods 0.000 claims description 4
- 238000012790 confirmation Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 16
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 229910000077 silane Inorganic materials 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- IKOKHHBZFDFMJW-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]-3-(2-morpholin-4-ylethoxy)pyrazol-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C=1C(=NN(C=1)CC(=O)N1CC2=C(CC1)NN=N2)OCCN1CCOCC1 IKOKHHBZFDFMJW-UHFFFAOYSA-N 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 229920004449 Halon® Polymers 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- PXBRQCKWGAHEHS-UHFFFAOYSA-N dichlorodifluoromethane Chemical compound FC(F)(Cl)Cl PXBRQCKWGAHEHS-UHFFFAOYSA-N 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- -1 fires Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6601390U JPH0438185Y2 (en]) | 1990-06-25 | 1990-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6601390U JPH0438185Y2 (en]) | 1990-06-25 | 1990-06-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0310141U JPH0310141U (en]) | 1991-01-30 |
| JPH0438185Y2 true JPH0438185Y2 (en]) | 1992-09-08 |
Family
ID=31598363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6601390U Expired JPH0438185Y2 (en]) | 1990-06-25 | 1990-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0438185Y2 (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4247468B2 (ja) * | 2003-07-11 | 2009-04-02 | 忠弘 大見 | クリーンルームの局部消火システム |
| JP5319480B2 (ja) * | 2009-10-05 | 2013-10-16 | ホーチキ株式会社 | 制御盤消火設備 |
| JP5319479B2 (ja) * | 2009-10-05 | 2013-10-16 | ホーチキ株式会社 | 防災監視システムおよび防災監視システムの制御方法 |
-
1990
- 1990-06-25 JP JP6601390U patent/JPH0438185Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0310141U (en]) | 1991-01-30 |
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